Formation and Characterization of Hole Nanopattern on Photoresist Layer by Scanning Near-Field Optical Microscope
نویسندگان
چکیده
منابع مشابه
Near-field scanning optical microscope probe analysis.
In this article results of a comparison of two NSOM probe characterization methods are presented. Scanning electron microscopy analysis combined with electromagnetic field modeling using the finite difference in time domain method are compared with measured far-field radiation diagrams of NSOM probes. It is shown that measurement of far-field radiation diagrams can be an efficient tool for dail...
متن کاملAn overview of scanning near-field optical microscopy in characterization of nano-materials
Scanning Near-Field Optical Microscopy (SNOM) is a member of scanning probe microscopes (SPMs) family which enables nanostructure investigation of the surfaces on a wide range of materials. In fact, SNOM combines the SPM technology to the optical microscopy and in this way provide a powerful tool to study nano-structures with very high spatial resolution. In this paper, a qualified overview of ...
متن کاملAn overview of scanning near-field optical microscopy in characterization of nano-materials
Scanning Near-Field Optical Microscopy (SNOM) is a member of scanning probe microscopes (SPMs) family which enables nanostructure investigation of the surfaces on a wide range of materials. In fact, SNOM combines the SPM technology to the optical microscopy and in this way provide a powerful tool to study nano-structures with very high spatial resolution. In this paper, a qualified overview of ...
متن کاملA compact fluorescence and polarization near-field scanning optical microscope
We present a transmission, fluorescence, and polarization near-field scanning optical microscope with shear-force feedback control that is small in size and simple to operate. This microscope features an ultrafine mechanical tip/sample approach with continuous manual submicron control over a range of several millimeters. The piezo-driven 12 mm x-y scan range is complimented by a 4 mm coarse mec...
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ژورنال
عنوان ژورنال: Nanomaterials
سال: 2019
ISSN: 2079-4991
DOI: 10.3390/nano9101452